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Model

QNP2-100XYA-030

QNP2-100XYA-100

QNP2-150XYA-200

Closed-Loop Travel (X x Y)

30 μm x 30 μm

100 μm x 100 μm

200 μm x 200 μm

Open-Loop Travel, -30 to +150 V⁽¹⁾

36 μm x 36 μm

120 μm x 120 μm

240 μm x 240 μm

Resolution⁽²⁾

Closed-Loop

0.1 nm

0.30 nm

0.40 nm

Open-Loop

0.03 nm

0.15 nm

0.20 nm

Linearity^(3,4)

0.02%

0.01%

0.01%

Bidirectional Repeatability⁽⁵⁾

4 nm

1 nm

1 nm

Straightness

25 nm

10 nm

10 nm

2D Flatness (Over Full XY Travel)

15 nm

5 nm

15 nm

Pitch

5 μrad (1 arc sec)

1.5 μrad (0.3 arc sec)

1.5 μrad (0.3 arc sec)

Yaw

5 μrad (1 arc sec)

12 μrad (2.5 arc sec)

20 urad (4 arc sec)

Stiffness (in direction of motion)⁽⁶⁾

33 N/μm

2.1 N/μm

1.7 N/μm

Unloaded Resonant Frequency⁽⁶⁾

2400 Hz

565 Hz

375 Hz

Resonant Frequency (200 gram load)⁽⁶⁾

1725 Hz

380 Hz

290 Hz

Max Payload⁽⁷⁾

1 kg

1 kg

3 kg

Maximum Acceleration (Unloaded)⁽⁸⁾

400 m/s²

170 m/s²

40 m/s²

Moving Mass (Unloaded)

0.14 kg

0.14 kg

0.5 kg

Stage Mass

0.36 kg

0.48 kg

1.2 kg

Material

Anodized aluminum⁽⁹⁾

Anodized aluminum⁽⁹⁾

Anodized aluminum⁽⁹⁾

MTBF (Mean Time Between Failure)

30,000 hours

30,000 hours

30,000 hours

Model

QNP3-100XYAZ-030-10

QNP3-100XYAZ-100-10

QNP3-150XYAZ-200-20

Closed-Loop Travel (X x Y x Z)

30 μm x 30 μm x 10 μm

100 μm x 100 μm x 10 μm

200 um x 200 um x 20 um

Open-Loop Travel, -30 to +150 V⁽¹⁾

36 μm x 36 μm x 12 μm

120 μm x 120 μm x 12 μm

240 um x 240 um x 25 um

Resolution⁽²⁾

Closed-Loop

0.1 nm (XY); 0.15 nm (Z)

0.30 nm (XY); 0.15 nm (Z)

0.4 nm (XY), 0.15 nm (Z)

Open-Loop

0.03 nm (XY); 0.05 nm (Z)

0.15 nm (XY); 0.05 nm (Z)

0.2 nm (XY), 0.1 nm (Z)

Linearity^(3,4)

0.02% (XY); 0.04% (Z)

0.01% (XY); 0.02% (Z)

0.01% (XY); 0.02% (Z)

Bidirectional Repeatability⁽⁵⁾

4 nm (XY); 3 nm (Z)

2 nm (XY); 1 nm (Z)

2 nm (XY); 2 nm (Z)

Straightness

25 nm (XY); 50 nm (Z)

<10 nm (xy); <20 nm (z)

10 nm (XY); 40 nm (Z)

2D Flatness (Over Full XY Travel)

10 nm

<5 nm

<10 nm

Pitch

10 μrad (2.1 arc sec) (XY)

6 μrad (1.2 arc sec) (Z)

2 μrad (0.4 arc sec) (XY); 6 μrad (1.2 arc sec) (Z)

2 urad (0.4 arcsec) (XY); 6 urad (1.2 arcsec) (Z)

Yaw

5 μrad (1 arc sec) (XY)

5 μrad (1 arc sec) (Z)

10 μrad (2.1 arc sec) (XY); 5 μrad (1 arc sec) (Z)

20 urad (4 arcsec) (XY); 6 urad (1.2 arcsec) (Z)

Stiffness (in direction of motion)⁽⁶⁾

10 N/μm (XY); 25 N/μm (Z)

1.9 N/μm (XY); 13 N/μm (Z)

1.3 N/μm (XY); 8.7 N/um (Z)

Unloaded Resonant Frequency⁽⁶⁾

1850 Hz (XY); 2200 Hz (Z)

490 Hz (XY); 1425 Hz (Z)

330 Hz (XY); 910 Hz (Z)

Resonant Frequency (200 gram load)⁽⁶⁾

950 Hz (XY); 1390 Hz (Z)

350 Hz (XY); 910 Hz (Z)

260 Hz (XY); 670 Hz (Z)

Max Payload⁽⁷⁾

1 kg

1 kg

3 kg

Max Acceleration (Unloaded)⁽⁸⁾

400 m/s² (XY); 2000 m/s² (Z)

115 m/s² (XY); 2000 m/s² (Z)

35 m/s2 (XY); 1000 m/s2

Moving Mass (Unloaded)

0.24 kg (XY); 0.05 kg (Z)

0.21 kg (XY); 0.05 kg (Z)

0.58 kg (XY); 0.10 kg

Stage Mass

0.53 kg

0.56 kg

1.3 kg

Material

Anodized aluminum⁽⁹⁾

Anodized aluminum⁽⁹⁾

Anodized aluminum⁽⁹⁾

MTBF (Mean Time Between Failure)

30,000 Hours

30,000 Hours

30,000 Hours